• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    Disclosed herein is a method for fabricating thin film transistors comprising the steps of: forming a gate electrode on an insulating substrate; forming a gate oxide film on the insulating substrate and gate electrode; depositing a polysilicon layer on the gate oxide film; implanting a first impurity ion into the polysilicon layer to control a threshold voltage of the polysilicon layer; forming a first ion-implanting mask on a portion of the polysilicon layer above the gate electrode, the first ion-implanting mask having approximately the same width as that of the gate electrode; implanting a second impurity ion into the exposed portion of the polysilicon layer using the first ion implanting mask, to form a lightly doped offset region on a region intended for a drain region; removing the first ion-implanting mask; forming a second ion-implanting mask on the polysilicon layer in such a manner that the second ion-implanting mask covers a portion of the gate electrode and the light doped offset region; implanting a third impurity ion into the polysilicon layer using the second ion implanting mask to form source/drain regions; and removing the second ion-implanting mask.
    公开号:US20010004537A1
    申请号:US09/737,774
    申请日:2000-12-18
    公开日:2001-06-21
    发明作者:Sung Lee
    申请人:Hyundai Electronics Industries Co Ltd；
    IPC主号:H01L27-127
    专利说明:
    [0001] 1. Field of the Invention [0001]
    [0002] The present invention relates to a method for fabricating thin film transistors and, more particularly, to a method for fabricating a thin film transistor having improved electrical properties. [0002]
    [0003] 2. Description of the Related Art [0003]
    [0004] Thin film transistors are commonly used as a driving device for liquid crystal displays or as a pull-up device in a Static Random Access Memory (SRAM). Such thin film transistors are formed on an insulating substrate and have a bottom gate type structure. Thin film transistors used in the SRAM application are highly advantageous in providing improved net die yield of the semiconductor device as compared to a typical full MOS transistor. [0004]
    [0005] The conventional method will be described and illustrated with reference to the fabrication of a thin film transistor suitable for use as a pull-up device in a SRAM. Various of the steps and layers are illustrated in the cross-sectional views provided in the figures. [0005]
    [0006] A semiconductor substrate [0006] 1 is provided on which a predetermined lower layer 2 is formed. This lower layer 2 is preferably an insulating film that covers patterns existing on the substrate. A gate electrode 3 a is then formed on the lower layer 2. Reference numeral 3 b shows a node contact line. A gate oxide film 4 is then formed on the lower layer 2, the gate electrode 3 a, and the node contact line 3 b. A polysilicon film is then deposited on the gate insulating film 4. In portions of the polysilicon layer disposed on either side of the gate electrode 3 a, source and drain regions 5 a, 5 b are then formed using a conventional ion-implanting process by, for example, selectively implanting boron ions into the polysilicon film. As a result, a thin film transistor having a bottom gate type is fabricated. In this case, a portion of the polysilicon layer between the source region 5 a and the drain region 5 b acts as a channel region 5 c. The source region 5 a is partially overlapped with the gate electrode 5 c. Also, the source/drain regions 5 a, 5 b are formed in such a way that a light doped offset region is formed in the drain region 5 b in order to minimize the hot carrier effect.
    [0007] However, in the prior art thin film transistor described above, the polysilicon layer acting as the channel layer is thin and thus has lower charge mobility than that provided by a typical bulk transistor. For this reason, the thin film transistor according to the prior art suffers from inferior electrical properties, such as a low on-current and a high off-current (i.e., leakage current), and thus exhibits increased signal swings. [0007]
    [0008] Specifically, the polysilicon layer for the channel layer in the prior art thin film transistor has a thickness of, for example, only 200 to 300 Å. Even though the ion-implant that forms the source and drain regions utilizes a lightly doped offset (LDO) ion implantation process to minimize the hot carrier effect, the polysilicon channel layer becomes excessively doped as a result of its thinness. As a result of this excessive doping, the prior art thin film transistor exhibits degraded punch-through resistance and increased hot carrier effects. [0008] SUMMARY OF THE INVENTION
    [0009] It is therefore an object of the present invention to provide a method for the fabrication of a thin film transistor having improved electrical properties. [0009]
    [0010] To achieve the above object, the present invention provides a method for fabricating a thin film transistor comprising the steps of: forming a gate electrode on an insulating substrate; forming a gate oxide film on the insulating substrate and gate electrode; depositing a polysilicon layer on the gate oxide film; implanting a first impurity ion into the polysilicon layer to control a threshold voltage of the polysilicon layer; forming a first ion-implanting mask on a portion of the polysilicon layer above the gate electrode, the first ion-implanting mask having the same width as that of the gate electrode; implanting a second impurity ion into the exposed region of the polysilicon layer using the first ion-implanting mask, to form a lightly doped offset region in the drain region; removing the first ion-implanting mask; forming a second ion-implanting mask on the polysilicon layer in such a manner that the second ion-implanting mask covers a portion of the gate electrode and the lightly doped offset region; implanting a third impurity ion into the polysilicon layer using the second ion-implanting mask to form source/drain regions; and removing the second ion-implanting mask. [0010]
    [0011] This and other objects and aspects of the invention will be apparent from the following description of preferred embodiments and through reference to the accompanying figures. [0011] BRIEF DESCRIPTION OF THE DRAWINGS
    [0012] FIG. 1 is a cross-sectional view showing a prior art thin film transistor that is suitable for use as a pull-up device in a SRAM; [0012]
    [0013] FIGS. 2A to [0013] 2F are cross-sectional views illustrating a method of fabricating a thin film transistor according to the present invention; and
    [0014] FIG. 3 is a graph showing punch-through voltage as a function of a gate electrode width, for a thin film transistor according to the prior art and a thin film transistor according to the present invention. [0014] DETAILED DESCRIPTION OF THE INVENTION
    [0015] A preferred embodiment of a method according to the present invention will now be described with reference to FIGS. 2A to [0015] 2F. In this embodiment, a description will be given to a method for fabricating a thin film transistor suitable for use as a pull-up device in a SRAM.
    [0016] Referring to FIG. 2A, there is shown a semiconductor substrate [0016] 10 on which a predetermined lower layer 11 has been formed. The lower layer 11 is preferably an insulating film which is formed over the semiconductor substrate 10 so as to cover all existing patterns, such as transistors. Thus, the lower layer 11 may comprise an insulating substrate. A polysilicon layer for forming a gate is deposited on the lower layer, and patterned and etched by conventional photolithography and etch processes to form a gate electrode 12 a. Reference numeral 12 b represents a node contact line. A gate insulating film 13 is then deposited on the gate electrode 12 a, the node contact line 12 b and the lower layer 11. This gate insulating film 13 consists of a HTO (high temperature oxide) or MTO (middle temperature) film, which is deposited by low pressure chemical vapor deposition (LPCVD) or plasma enhanced chemical vapor deposition (PECVD) to a thickness of between about 100 and 2,000 Å.
    [0017] Referring to FIG. 2B, a portion of the gate insulating film [0017] 13 formed on the node contact line 12 b is partially removed by conventional photolithography and etch processes. A polysilicon layer 14 for forming the channel layer is then deposited on the gate insulating film 13 and the exposed portion of the node contact line 12 b. The polysilicon layer 14 for the channel layer is deposited by LPCVD to a thickness of between about 200 and 2,000 Å.
    [0018] Referring to FIG. 2C, to control a threshold voltage of a thin film transistor being fabricated, a first impurity ion [0018] 30 is implanted into the entire polysilicon layer 14 intended for the channel layer without the use of a mask. The first impurity ion 30 may be either n-type or p-type, preferably using either BF2 or P ions.
    [0019] Referring to FIG. 2D, a first ion-implanting mask [0019] 20 is formed to protect that portion of the polysilicon layer 14 that will correspond to the channel region of the thin film transistor. The first ion-implanting mask 20 is preferably a photoresist pattern, and has the same width as that of the gate electrode 12 a. To form a lightly doped offset region, a low concentration of a second impurity ion 31 is implanted into the exposed portion of the polysilicon layer 14. The step of implanting the second impurity ion includes a first sub-step of implanting a BF2 ion and a second sub-step of implanting a N2 ion, the first and second sub-steps being carried out sequentially. The second sub-step of implanting the N2 ion preferably provides a dopant concentration of 1013 to 1016 ions/cm2 at an ion implantation energy of 30 to 50 KeV.
    [0020] The nitrogen ions implanted into the polysilicon layer penetrate the diffusion paths of the boron ions and inhibit the diffusion of the boron ions. For this reason, even when the channel width is narrow, the hot carrier effect is decreased and the punch-through characteristic is improved. [0020]
    [0021] Referring to FIG. 2E, after the first ion-implanting mask is removed, the second ion-implanting mask [0021] 21 is formed on the polysilicon layer that was subjected to the previous double impurity-ion implantation. Like the first ion-implanting mask, the second ion-implanting mask 21 is preferably a photoresist pattern. This second ion-implanting mask 21 is formed in such a manner that it covers a portion of the polysilicon layer 14 above the gate electrode 12 a, and opens that portion of polysilicon layer 14 above the gate electrode 12 a intended for the lightly doped offset region. A third impurity ion is then implanted into the exposed portion of the polysilicon layer at high concentrations to form source/drain regions 15 a, 15 b. In this regard, the source region 15 a partially overlaps the gate electrode 12 a, so that the width of the channel region 15 c is decreased by the width of the source overlap region (SO), and the source region 15 a is enlarged by the width of the source overlap region (SO). The source overlap region (SO) has a width of 0.09 to 0.11 μm, preferably about 0.1 μm. Also, the drain region 15 b includes a lightly doped offset (LDO) region. A portion of the polysilicon layer disposed between the source region 15 a and the LDO region is the channel region 15 c.
    [0022] Referring to FIG. 2F, the second ion-implanting mask is removed to fabricate a thin film transistor. [0022]
    [0023] The thin film transistor of the present invention fabricated as described above minimizes the hot carrier effect caused by the boron ion diffusion and also exhibits improved punch-through properties. [0023]
    [0024] FIG. 3 is a graph showing punch-through voltage as a function of gate electrode width for both a thin film transistor according to the prior art and a thin film transistor according to the present invention. [0024]
    [0025] As shown in FIG. 3, the punch-through voltage [0025] 50 for the thin film transistor implanted with the N2 ion according to the present invention is greatly increased at narrower gate electrode widths, when compared to the punch-through voltage 40 obtained by the prior art thin film transistor which did not receive the N2 ion implant.
    [0026] Accordingly, as the method of the present invention provides a thin film transistor exhibiting excellent punch-through properties, it enables the fabrication of highly integrated semiconductor devices having excellent electrical properties. [0026]
    [0027] Meanwhile, although the embodiment as described above illustrates the fabrication of the thin film transistor suitable for use as the pull-up device in a SRAM, the method of the present invention may likewise be applied to the fabrication of a thin film transistor for driving liquid crystal displays. [0027]
    [0028] As is apparent from the foregoing description, the method for fabricating the thin film transistor according to the present invention includes implanting N[0028] 2 ions after implanting the BF2 ions, during the impurity ion implantation step to form a lightly doped offset region. The implanted nitrogen ions inhibit diffusion of the boron ions. Accordingly, the method according to the present invention can minimize the adverse influence of the hot carriers and improve the punch-through properties of the resulting thin film transistors. As a result, the present method can be used to produce highly integrated semiconductor devices having improved electrical properties.
    [0029] Although the preferred embodiments of the invention have been disclosed for illustrative purposes, those skilled in the art will appreciate that various modifications, additions and substitutions are possible without departing from the scope and spirit of the invention as disclosed in the accompanying claims. [0029]
    权利要求:
    Claims (12)
    [1" id="US-20010004537-A1-CLM-00001] 1. A method for the fabrication of a thin film transistor, comprising the steps of:
    forming a gate electrode on an insulating substrate;
    forming a gate oxide film on the insulating substrate and the gate electrode;
    depositing a polysilicon layer on the gate oxide film;
    implanting a first impurity ion into the polysilicon layer to control a threshold voltage of the polysilicon layer;
    forming a first ion-implanting mask on a portion of the polysilicon layer placed on the gate electrode, the first ion-implanting mask having approximately the same width as that of the gate electrode;
    implanting a second impurity ion into the exposed portion of the polysilicon layer using the first ion-implanting mask, to form a lightly doped offset region on a region intended for a drain region;
    removing the first ion-implanting mask;
    forming a second ion-implanting mask on the polysilicon layer in such a manner that the second ion-implanting mask covers a portion of the gate electrode and the lightly doped offset region;
    implanting a third impurity ion into the polysilicon layer using the second ion implanting mask to form source/drain regions; and
    removing the second ion-implanting mask.
    [2" id="US-20010004537-A1-CLM-00002] 2. The method of
    claim 1 , in which the gate oxide film consists of a high temperature oxide (HTO) or middle temperature oxide (MTO) film.
    [3" id="US-20010004537-A1-CLM-00003] 3. The method of
    claim 2 , in which the gate oxide film is formed by Low Pressure Chemical Vapor Deposition (LPCVD) or Plasma Enhanced Chemical Vapor Deposition (PECVD).
    [4" id="US-20010004537-A1-CLM-00004] 4. The method of
    claim 3 , in which the gate oxide film has a thickness of about 100 to 2000 Å.
    [5" id="US-20010004537-A1-CLM-00005] 5. The method of
    claim 1 , in which the polysilicon layer is formed by Low Pressure Chemical Vapor Deposition (LPCVD).
    [6" id="US-20010004537-A1-CLM-00006] 6. The method of
    claim 5 , in which the polysilicon layer has a thickness of about 100 to 2000 Å.
    [7" id="US-20010004537-A1-CLM-00007] 7. The method of
    claim 1 , in which the first and second ion-implanting masks consist of a photoresist pattern.
    [8" id="US-20010004537-A1-CLM-00008] 8. The method of
    claim 1 , in which the step of implanting the first impurity ion is carried out by implanting a BF2 or P ion.
    [9" id="US-20010004537-A1-CLM-00009] 9. The method of
    claim 1 , in which the step of implanting the second impurity ion further comprises implanting a BF2 ion and then implanting a N2 ion.
    [10" id="US-20010004537-A1-CLM-00010] 10. The method of
    claim 9 , in which the N2 ion is implanted at a dopant concentration of between 1013 and 1016 ions/cm2 and at an ion implantation energy of between 30 and 50 KeV.
    [11" id="US-20010004537-A1-CLM-00011] 11. The method of
    claim 1 , in which the source region is formed in such a manner that it partially overlaps with the gate electrode.
    [12" id="US-20010004537-A1-CLM-00012] 12. The method of
    claim 11 , in which the overlap width of the source region is between about 0.09 and 0.11 μm.
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    引用文献:
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    法律状态:
    2000-12-18| AS| Assignment|Owner name: HYUNDAI ELECTRONICS INDUSTRIES CO., LTD., KOREA, R Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:LEE, SUNG KWON;REEL/FRAME:011414/0925 Effective date: 20001211 |
    2006-12-18| FPAY| Fee payment|Year of fee payment: 4 |
    2010-12-02| FPAY| Fee payment|Year of fee payment: 8 |
    2015-02-13| REMI| Maintenance fee reminder mailed|
    2015-07-08| LAPS| Lapse for failure to pay maintenance fees|
    2015-08-03| STCH| Information on status: patent discontinuation|Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |
    2015-08-25| FP| Expired due to failure to pay maintenance fee|Effective date: 20150708 |
    优先权:
    申请号 | 申请日 | 专利标题
    KR1999-58887||1999-12-18||
    KR1019990058887A|KR20010057116A|1999-12-18|1999-12-18|Method of manufacturing thin film transistor for improving electrical characteristic of that|
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